Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switch | Semantic Scholar
Anti-stiction coating for mechanically tunable photonic crystal devices
PDF) Anti-stiction coatings for MEMS devices
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments - ScienceDirect
MVD® Anti-stiction Coating for MEMS
Anti-stiction Layer Coating System SVS Series by Sorona - Komachine Supplier Profile and Product List
![Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]](https://uspto.report/patent/grant/10513432/US10513432-20191224-D00000.png "Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]")
Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]
Research
Anti-stiction coatings for MEMS devices - Document - Gale Academic OneFile
![PDF] Anti-stiction coating for imprint using Autoclave by 이상문, 나승현, 문진석, 곽정복 · 2354728390 · OA.mg](https://og.oa.mg/Anti-stiction%20coating%20for%20imprint%20using%20Autoclave.png?author=%20%EC%9D%B4%EC%83%81%EB%AC%B8,%20%EB%82%98%EC%8A%B9%ED%98%84,%20%EB%AC%B8%EC%A7%84%EC%84%9D,%20%EA%B3%BD%EC%A0%95%EB%B3%B5 "PDF] Anti-stiction coating for imprint using Autoclave by 이상문, 나승현, 문진석, 곽정복 · 2354728390 · OA.mg")
PDF] Anti-stiction coating for imprint using Autoclave by 이상문, 나승현, 문진석, 곽정복 · 2354728390 · OA.mg
Stiction and anti-stiction in MEMS and NEMS
Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
![PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/258e2b43c99abee6e5c9796e40992d278cb3e482/2-Table1-1.png "PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar")
PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar
An improved vapor-phase deposition technique for anti-stiction monolayers
PDF) Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS | Wolfgang Benecke and Thomas Knieling - Academia.edu
![Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]](https://uspto.report/patent/grant/10759654/US10759654-20200901-D00001.png "Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]")
Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]
Anti-Stiction for MEMS | IST | Vapor deposited nano-films & nano-coatings for your devices
MVD Anti-stiction Coating for MEMS | SPTS
Preventing common MEMS failure mechanisms(3)
Anti-stiction coatings for MEMS devices - Document - Gale Academic OneFile
Anti-stiction coatings for MEMS devices - Document - Gale Academic OneFile
IR microscope image of lateral anti-stiction MEMS test structures: a... | Download Scientific Diagram
Figure 2 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
